Nhigh-k gate dielectrics for cmos technology books

Highk gate dielectrics for cmos technology semantic scholar. A stateoftheart overview of highk dielectric materials for advanced fieldeffect transistors, from both a fundamental and a technological. A stateoftheart overview of highk dielectric materials. Ma yale university, center for microelectronics, and department of electrical engineering new haven, ct 065208284 introduction highk dielectrics are being actively pursued by the semiconductor industry to replace sio2 as the gate dielectric for future generations of cmos transistors. A stateoftheart overview of highk dielectric materials for advanced. The scaling of complementary metal oxide semiconductor cmos transistors has led to the silicon dioxide layer used as a gate dielectric becoming so thin that the gate leakage current becomes too large. Everyday low prices and free delivery on eligible orders. Request pdf on aug 23, 2012, gang he and others published highk gate dielectrics for cmos technology find, read and cite all the research you need on researchgate.

Highk gate dielectrics for cmos technology researchgate. Due to its large file size, this book may take longer to download. Buy highk gate dielectrics for cmos technology by he, gang, sun, zhaoqi isbn. Intensive research was carried out to develop these oxides into high quality electronic materials. Highk materials and metal gates for cmos applications. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials.

Highk gate dielectrics for cmos technology request pdf. Highk gate dielectrics for cmos technology advanced science. Request pdf highk gate dielectrics for cmos technology a stateoftheart. As such, the book clearly discusses the advantages of these materials over. Highk gate dielectrics for cmos technology 9783527330324. This led to the replacement of sio 2 by a physically thicker layer of a higher dielectric constant or highk oxide such as hafnium oxide. Main highk gate dielectrics for cmos technology highk gate dielectrics for cmos technology a stateoftheart overview of highk dielectric materials for advanced fieldeffect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions. Highk gate dielectrics for cmos technology download. Request pdf highk gate dielectrics for cmos technology a stateoftheart overview of highk dielectric materials for advanced fieldeffect transistors, from both a fundamental and a.